The enhanced 64-bit RISC-V MPU offers users greater flexibility by providing the tools and components needed to accelerate time-to-market, including technical support through Renesas' RZ Partner Ecosystem. It is a 64-bit single-core microprocessor with a maximum operating frequency of 1 GHz. The MPU has 128 KB of internal ECC SRAM and 16-bit DDR4-1600 or DDR3L-1333 inline ECC memory interfaces supporting up to 4 GB of RAM. Peripheral features include support for numerous interfaces, including two Gigabit Ethernet MAC channels, two USB 2.0 channels, and two CAN/CAN-FD serial interfaces. Additional features of the RZ/Five include a 12-bit, 2-channel ADC, a thermal sensor, four I²C interfaces, three SPI interfaces, and GPIO headers.

The microprocessor is available in a 13 mm × 13 mm BGA-361 package or an 11 × 11 mm BGA-266 package. The BGA-361 option includes a 2-channel Gigabit Ethernet interface, while the BGA-266 option includes a 1-channel Gigabit Ethernet interface. Both packages have a 0.5 mm pitch. The RZ/Five-RISC-V microprocessor, developed specifically for Internet of Things (IoT) terminals, is ideal for applications such as the Industrial IoT (IIoT) or industrial gateways used for basic social infrastructure control and industrial control, respectively.

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