As a result, it contributes to the creation of fine patterns and the improvement of production throughput in maskless lithography for advanced semiconductor encapsulation.
* As of January 16, 2026, based on internal Nuvoton research on semiconductor lasers emitting at 379 nm in TO-9 packages under continuous-wave (CW) operation at a case temperature (Tc) of 25 °C.
Key achievements
: Achieves Class 1.0 W optical power at 379 nm, contributing to finer patterning and increased productivity in maskless lithography for advanced semiconductor packaging.
Improves heat dissipation of ultraviolet lasers through proprietary device structure and encapsulation technology, suppressing degradation caused by self-heating and UV radiation, and extending the lifespan of optical equipment.
Expands the range of mercury lamp replacement solutions, increasing flexibility in product selection based on application.
New Product Features
1. High Power 1.0 W at 379 nm
The advancement of artificial intelligence is driving a growing demand for greater processing capabilities, requiring higher-performance semiconductors. As transistor miniaturization approaches its physical and economic limits, advanced semiconductor packaging—enabling integration using chips placed in parallel or stacked vertically—is becoming increasingly important.
In this context, maskless lithography, which allows direct exposure of wiring patterns from design data without the need for photomasks, is gaining traction for reducing costs and lead times, as well as facilitating alignment and correction on complex surfaces.
As the key light source in this technology, semiconductor lasers require shorter wavelengths, closer to the i-line (365 nm), and higher power. Leveraging over 40 years of experience in laser design and manufacturing, Nuvoton has developed and commercialized this 1.0 W, 379 nm ultraviolet laser.
2. Improved Heat Dissipation and Longer Lifespan:
Ultraviolet lasers typically generate a lot of heat due to their low electrical-optical conversion efficiency (WPE) and UV-induced degradation. Nuvoton has addressed this challenge by combining a device structure that improves WPE with a high thermal conductivity encapsulation technology, achieving stable operation at high power and a longer device lifespan.
3. Mercury Lamp Replacement
This new product joins the range of semiconductor laser-based alternatives to replace mercury lamps, offering customers greater freedom in system design according to application, environment and performance requirements.
Applications:
Maskless Lithography (LDI),
Resin Curing,
Marking,
3D Printing,
Biomedical,
Mercury Lamp Replacement.
Product Name: KLC330FL01WW.
Wavelength: 379 nm
. Optical Power: 1.0 W.
Package: TO-9 CAN.
Mass Production Start: March 2026
