One of the main new features is the Trelleborg PureFab range, developed to offer high purity, low contamination, resistance to high temperatures and reduced levels of outgassing.
The family incorporates two perfluoroelastomer (FFKM) materials, JPF50 and JPF58, and one fluoroelastomer (FKM), VPF20, manufactured without the use of fluorosurfactants. According to Trelleborg, these materials maintain the strength and durability performance required for demanding applications.
The elimination of fluorosurfactants responds to the growing interest in reducing the use of these substances, which are under greater scrutiny due to their environmental persistence.
Isolast PureFab materials for chip manufacturing processes
Trelleborg also presents its Isolast PureFab range, comprised of FFKM materials for semiconductor manufacturing processes. These materials are designed for deposition, etching, waste removal, plasma cleaning, and heat treatment applications, including atomic layer deposition (ALD). Key features include high-temperature stability, high purity, low trace metal content, and plasma resistance.
These properties help reduce particle generation and outgassing under high vacuum conditions, important factors in preventing contamination during chip manufacturing.
Gaskets for transfer chambers and vacuum pumps
The company is also showcasing rubber-to-metal groove valve seals designed for wafer transfer chambers. These components combine wear resistance and low outgassing, making them ideal for high-volume semiconductor manufacturing equipment.
Another solution presented is the Turcon Varilip PDR rotary joints, designed for vacuum pumps.
Their low-friction operation, free from stick-slip movements, limits heat generation, allows for higher peripheral speeds, and reduces energy consumption. According to tests cited by Trelleborg, these seals require approximately 50% of the operating torque of a conventional radial seal when using Fomblin oil, commonly used in semiconductor vacuum pumps.
Sealing solutions for flanges and vacuum applications
The offering includes various flange sealing systems, among them Turcon Variseal NW, which incorporates an energizing spring protected by a Turcon housing. This configuration prevents contact between the spring and its housing and the process medium, making it suitable for vacuum and fluorinated gas applications. Also featured is the Isolast K-Fab flange gasket, manufactured from FFKM and designed to withstand extreme temperatures and complex chemicals.
Its design uses less elastomeric material than conventional O-rings, improving thermal performance and reducing problems associated with material expansion. The company completes its product line with O-ring centering rings, available in standard and custom versions using FKM and Isolast PureFab FFKM materials.
Simulation to predict the lifespan of gaskets
In addition to materials and components, Trelleborg showcases its engineering capabilities to develop sealing solutions tailored to specific applications. These include the use of finite element analysis (FEA) to model the permanent compression deformation of elastomers and estimate the service life of seals.
According to Chris Busby, Global Segment Director of Trelleborg Sealing Solutions, this approach allows for more accurate predictions about the durability of components than those based solely on conventional testing.
With these new developments, the company seeks to meet the demands of semiconductor equipment manufacturers, especially in terms of purity, chemical resistance, thermal stability and reduced maintenance costs.
