Chris Busby, global head of the semiconductor segment, states: “These new high-temperature perfluoroelastomer (FFKM) and fluoroelastomer (FKM) materials are ‘fluorinated surfactant-free,’ meaning they are manufactured without low-molecular-weight fluorinated PFAS surfactants. As regulations evolve to reduce PFAS use, these new materials can help customers protect themselves against regulatory risks and strengthen their supply chain.
The new materials—two FFKMs, JPF50 and JPF58, and the FKM VPF20—perform without compromising material performance or durability. We invite all interested customers to request samples for testing.”

Isolast® PureFab® JPF50 is a high-purity FFKM formulated to meet stringent purity and plasma resistance requirements across a wide range of chemical compositions and the most common thin-film precursors. Manufactured without fillers or fluorinated surfactants, it extends shelf life and enhances performance.
JPF50 helps reduce contamination risks and maximizes process yields thanks to its extremely low outgassing and minimal particulate emissions, delivering exceptional performance at high temperatures up to +300 °C/+572 °F, ensuring reliable sealing in the harshest environments. It is designed with low permanent compression set and high mechanical strength to allow for longer maintenance intervals and help minimize unplanned downtime.

The JPF50 excels in gaskets and components for deposition processes (PECVD, HDPCVD, PEALD) and etching (ALE, dry etching), and is ideal for gaskets for chamber covers and gas inlets, as well as for bonded groove valve door gaskets.

Isolast® PureFab® JPF58 is an FFKM developed for sustained and reliable operation in environments with extreme temperatures, where long-term thermal stability and purity are essential.

The JPF58 offers exceptional thermal stability up to +300°C/+572°F, ensuring consistent gasket integrity over extended use and resisting cracking under high mechanical and thermal stresses, thus contributing to a longer service life. Withstanding exposure to aggressive process and exhaust gases, the JPF58 provides proven reliability in demanding applications, maintaining dimensional stability during continuous operation under heavy loads and elevated temperatures.

The material is ideal for gaskets and components in high-temperature processes, including RTP, ALD, CVD, and diffusion furnaces, as well as for quartz tube gaskets, distribution chambers, furnace chambers and doors, exhaust and vacuum connection flanges, and centering rings.
PureFab® VPF20 is a high-purity fluoroelastomer (FKM) that ensures contamination-free production to meet the stringent requirements of semiconductor and flat-panel display manufacturing. It combines a base polymer free of fluorinated surfactants with high-purity synthetic fillers to help minimize metallic contaminants and ionic extractables, delivering exceptional performance and reliability in applications where purity is critical.

Thanks to its high mechanical strength and elastic recovery, VPF20 offers greater durability in both static and dynamic sealing applications and demonstrates excellent chemical resistance to the main chemicals used in processes. VPF20 is a more cost-effective option than FFKM for applications with moderate temperatures and medium chemical requirements.
It is ideal for manufacturing gaskets in transfer modules, loading airlocks, equipment front modules (EFEMs), and vacuum handling systems, as well as general-purpose vacuum gaskets and flat panel display manufacturing equipment. It is also suitable for applications where purity is critical and where standard black FKMs pose a risk of contamination.
The entire PureFab® includes materials that offer excellent performance in aggressive front processes such as deposition, etching, ashing/pickling, plasma cleaning, and thermal processes like atomic layer deposition.